Silicon Micro-Accelerometers Based on Meso-Piezoresistance

A high sensitivity silicon micro-accelerometer based on meso-piezoresistance is proposed,in order to break through the traditional electro-mechanical transformation and enhance the accelerometer sensitivity.Based on this principle,the GaAs micro-accelerometer is designed and processed.The signal output of the structure with 0.1 gn input is obtained by simulation calculation and experimental result,furthermore,the magnitude of the piezoresistance sensitivity is compared with that of meso-piezoresistance.The feasibility of the high sensitivity sensor based on meso-piezoresistance is validated,which is helpful to the design of such kind of acceleration sensors.