MOLYBDENUM SPUTTERING FILM AND TARGET FOR TFT-LCD MANUFACTURE

As the key component,thin-film transistor directly determines the property of the thin-film transistor liquid crystal display(TFT-LCD).As the electrode and writing material,molybdenum has important applied value in the production of TFT-LCD.Upon the fundamental structure and principle of TFT-LCD,this manuscript emphasizes during the TFT-LCD manufacture process the application value of molybdenum,the preparation method and technical parameters of molybdenum film by magnetic sputtering,and the current study situation of the relative molybdenum sputtering target.