2P1-K03 Development of High-density Distributed Three-axis Tactile Sensors Fabricated by Nano-scale Thin Film Technologies : Simultaneous acquisition of pressure and shear forces employing three cantilevers

Our proposed tactile sensor employs minute three cantilevers as its sensor elements. These miniature sensor elements are aligned in horizontal triangular directions and covered by elastic material. When pressure and shear forces are applied on the surface of the elastic material, both the elastic body and the sensor elements are deformed. Our sensor measures the applied pressure and shear forces due to the deformation on the sensor elements electrically. In this paper, we propose and discuss a numerical calculation method of the applied force based on numerous pre-measured data pairs of a certain force and sensor elements' outputs when the certain force has been applied.