光电子学
材料科学
氮化物
氮化硅
光开关
硅
纳米技术
图层(电子)
作者
Siyang Zhou,Shuojian Zhang,Jia Guo,Zhuping Fan,Xiao Ma,Jian‐Jun He
摘要
A 2 × 2 Mech-Zehnder thermo-optic switch based on a 250 nm-thick silicon nitride platform is designed and fabricated. The measured excess on-chip loss is 0.3 dB and the extinction ratio is 31 dB.
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