材料科学
Crystal(编程语言)
电子迁移率
晶体管
场效应晶体管
光电子学
背景(考古学)
通量法
单晶
结晶学
电气工程
古生物学
化学
电压
计算机科学
生物
程序设计语言
工程类
作者
Vilas Patil,Jihyun Kim,Khushabu Agrawal,Tuson Park,Junsin Yi,Nobuyuki Aoki,Kenji Watanabe,Takashi Taniguchi,Gil‐Ho Kim
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2021-04-12
卷期号:32 (32): 325603-325603
被引量:7
标识
DOI:10.1088/1361-6528/abf6f1
摘要
Abstract Two-dimensional (2D) molybdenum disulphide (MoS 2 ) transition metal dichalcogenides (TMDs) have great potential for use in optical and electronic device applications; however, the performance of MoS 2 is limited by its crystal quality, which serves as a measure of the defects and grain boundaries in the grown material. Therefore, the high-quality growth of MoS 2 crystals continues to be a critical issue. In this context, we propose the formation of high-quality MoS 2 crystals via the flux method. The resulting electrical properties demonstrate the significant impact of crystal morphology on the performance of MoS 2 field-effect transistors. MoS 2 made with a relatively higher concentration of sulphur (a molar ratio of 2.2) and at a cooling rate of 2.5 °C h −1 yielded good quality and optimally sized crystals. The room-temperature and low-temperature (77 K) electrical transport properties of MoS 2 field-effect transistors (FETs) were studied in detail, with and without the use of a hexagonal boron nitride (h-BN) dielectric to address the mobility degradation issue due to scattering at the SiO 2 /2D material interface. A maximum field-effect mobility of 113 cm 2 V −1 s −1 was achieved at 77 K for the MoS 2 /h-BN FET following high-quality crystal formation by the flux method. Our results confirm the achievement of large-scale high-quality crystal growth with reduced defect density using the flux method and are key to achieving higher mobility in MoS 2 FET devices in parallel with commercially accessible MoS 2 crystals.
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