石墨烯
材料科学
压力传感器
相对湿度
磁滞
纳米技术
分析化学(期刊)
化学
有机化学
热力学
物理
凝聚态物理
作者
Junqiang Wang,Changzheng Xie,Mengwei Li,Jingyu Bai
标识
DOI:10.1109/ted.2022.3178365
摘要
Graphene with atomic layer thickness has excellent mechanical properties and provides tremendous potential for developing high-performance pressure sensors. However, bare graphene is sensitive to humidity, and oxygen in the air also significantly affects the stability of graphene pressure sensor. In this work, a highly sensitive pressure sensor was fabricated through the MEMS process and nanofilm transferring. The graphene sensing element is entirely isolated from the external environment by the initial protection of h-BN, followed by the secondary protection of Cu–Sn solid–liquid interdiffusion bonding. After the static test, an average sensitivity of $2.9\times10$ −4 kPa −1 was achieved over a pressure range from −80 to 0 kPa. Also, it exhibited excellent repeatability and minimal hysteresis. As graphene pressure sensor was exposed to ambient air for 30 days, the relative resistance change was just 2.3%. The resistance of graphene pressure sensor can also keep stable even if the device was stored in a high-temperature or high-humidity environment. Thus, this work provides a promising approach for the practical application of high-performance graphene pressure sensors.
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