材料科学
生物传感器
光电子学
电介质
极性(国际关系)
兴奋剂
制作
晶体管
蚀刻(微加工)
纳米技术
生物分子
灵敏度(控制系统)
偏压
栅极电介质
场效应晶体管
阈值电压
阈下传导
逻辑门
电压
电场
纳米线
量子隧道
电流(流体)
隧道场效应晶体管
图层(电子)
纳米孔
场效应
高-κ电介质
MOSFET
活动层
作者
Chan Shan,Qian-nan Wang,Ying Liu
标识
DOI:10.1088/1674-1056/adecfa
摘要
Abstract An in-built N + pocket electrically doped tunnel field-effect transistor (ED-TFET)-based biosensor has been reported for the first time. The proposed device begins with a PN junction structure with a control gate (CG) and two polarity gates (PG1 and PG2). Utilizing the polarity bias concept, a narrow N + pocket is formed between the source and channel without the need for additional doping steps, achieved through biasing PG1 and PG2 at −1.2 V and 1.2 V, respectively. This method not only addresses issues related to doping control but also eliminates constraints associated with thermal budgets and simplifies the fabrication process compared to traditional TFETs. To facilitate biomolecule sensing within the device, a nanogap cavity is formed in the gate dielectric by selectively etching a section of the polarity gate dielectric layer toward the source side. The investigation into the presence of neutral and charged molecules within the cavities has been conducted by examining variations in the electrical properties of the proposed biosensor. Key characteristics assessed include drain current, energy band, and electric field distribution. The performance of the biosensor is measured using various metrics such as drain current ( I DS ), subthreshold swing (SS), threshold voltage ( V TH ), drain current ratio ( I ON / I OFF ). The proposed in-built N + pocket ED-TFET-based biosensor reaches a peak sensitivity of 1.08×10 13 for a neutral biomolecule in a completely filled nanogap with a dielectric constant of 12. Additionally, the effects of cavity geometry and different fill factors (FFs) on sensitivity are studied.
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