The design and test of the single chip integration accelerometer gyroscope

Abstract: A single chip integration accelerometer is designed in this paper. By means of a silicon mass, it integrated the measurement of the two kinds of the inertial parameter on a single chip. The paper analyzed the measurement theory of the accelerometer gyroscope. And then some experiment to test the characteristics of the accelerometer gyroscope is introduced. The results show that this design can successfully detect the acceleration and angle velocity at the same time.