In this paper,optimal fabrication process of cathode film deposition for polymer cathode tantalum capacitor was investigated.The influence of surface active treatment of Ta2O5 film and the doping of polymer film on capacitor electrical performance,such as capacitance,anti-voltage endurance ability,and equivalent series resistance(ESR) were investigated in detail.The results showed that better matching between Ta2O5 film and PEDOT polymer layer occurred after an active treatment of Ta2O5 surface,which resulted in an improved extraction capacitance of tantalum capacitors.It was also found that an addition of isolated layer(BEST layer) between Ta2O5 film and PEDOT polymer layer can prevent the impurity ion from penetrating into Ta2O5 film effectively,and the obtained tantalum capacitor exhibited better anti-voltage endurance ability.Moreover,the results showed that a 3% of mass ratio of doping solution and a repairing voltage to Ta2O5 film-forming voltage about 70% can effectively reduce the ESR and leakage current of obtained polymer cathode tantalum capacitors.