Effects of electrode materials on the force sensitive characteristic of integrated resonator

The integrated three-electrode resonator was designed and fabricated on the same wafer. The relation of the resonators' the force sensitive characteristic with adding force azimuth was studied and comparing experiments of the resonators with Au or Al electodes were carried on. The results show that the resonators' force sensitive characteristic is closely related to adding force azimuth. When ψ is 0°, the force sensitive coefficient is maximum; and the electrode materials affect the resonators' force frequency characteristic through to effect its effective electro-mechanical coupling coefficient. Force-sensitive coefficient of integrated resonator with Au electrode is 189.8 Hz/N higher than that of Al electrode.