Fabrication and application of silicon tip in sensor technology

Fabrication of silicon tip is described.Then the ap pl ication of silicon tip in sensor technology is summarized.The method of fabricat ion of silicon tip is compatible with modern IC processing,in addition to the si licon tip can be easy to sharp,it is practical than other materials.It is believ ed that the application of silicon tip would be developed with the improvement o f fabrication technology and other correlation technology.