Enabling High‐Temperature Atomic‐Scale Investigations with Combinatorial Processing Platforms Using Improved Thermal SiO2 Diffusion and Reaction Barriers

Abstract Interactions at high temperatures between thin films and the Si substrate limit materials discovery using combinatorial processing platforms (CPPs). To overcome this, a diffusion and reaction barrier, SiO 2 , by thermal oxidation of Si tips is developed. The application of this diffusion barrier in CPPs for atomic‐scale investigations of new materials in atom probe tomography is reported. Thermal SiO 2 layers (20 and 50 nm thick) are examined as barriers to separate coatings from Si tips. Pt is chosen as it easily forms silicides. CPPs are sequentially annealed in vacuum at 400 °C for 10 h, 600 °C for 2 h, and 800 °C for 2 h. The thermal SiO 2 diffusion barrier remains stable and prevents intermixing at least up to 800 °C. Moreover, it provides improved film adhesion as dewetting of Pt on the oxide surface occurred at 800 °C instead of 600 °C without a thermal diffusion barrier. A comprehensive structural and chemical analysis of the Pt film, the thermal SiO 2 layer, and their interfaces is performed using scanning and transmission electron microscopy, and atom probe tomography. As a result, the thermal SiO 2 forms a stable barrier, even at the lowest thickness of 20 nm, avoiding the formation of Pt silicides, even at 800 °C.