Flexible and highly stable solar-blind photodetector based on room-temperature synthesis of amorphous Ga 2 O 3 film

Abstract Flexible photodetectors (PDs) have received enormous interest owing to their potential applications in portable information technology and modern wearable optoelectronic devices. Herein, flexible solar-blind PDs based on amorphous Ga 2 O 3 films fabricated on polyethylene naphthalate substrates at room temperature are demonstrated. The PD yields a responsivity up to 3.7 mA W −1 , a fast response speed of 80 ms, a large detectivity of 1.14 × 10 12 Jones, a high ultraviolet/visible rejection ratio of 6.1 × 10 3 , and an ultra-high photo-to-dark current ratio over 10 5 at 10 V, which is comparable to the performance of a device on a rigid substrate. Moreover, the device exhibits no obvious performance degradation even after mechanical bending over 10 3 cycles, indicating an excellent stability. Our results pave the route for the realization of high-performance solar-blind optoelectronics with a flexible substrate.