TiO2Thin film oxygen sensors

TiO2 thin film was made on an alumina rod through sol-gel process by dip-coating of a titania sol derived from titanium butanol alkoxide solution in ethanol. The dependence of the electric resistance (Rx) of TiO2 film on the oxygen partial pressure (PO2) and temperature (T) was determined. The TiO2 thin film oxygen sensor possesses a linear relations between lg(Rx) and lg(PO2) with temperature-dependent slopes. The response time of TiO2 thin film sensor was investigated and discussed