In recent years, application of InSAR (Interferometric Synthetic Aperture, Radar) to deformation monitoring has become a hotspot in research of geological hazards. This paper introduces the basic principles and data processing procedures of InSAR and summarizes main progresses made in InSAR technology and its application to deformation monitoring. Through actual examples of application and research at home and abroad, the article figures out existing problems and the future of application of InSAR.