Integration of atomically thin layers of transition metal dichalcogenides into high-Q, monolithic Bragg-cavities: an experimental platform for the enhancement of the optical interaction in 2D-materials

We demonstrate a new approach to integrate single layer MoSe 2 and WSe 2 flakes into monolithic all-dielectric planar high-quality micro-cavities.These distributed-Braggreflector (DBR) cavities may, e.g., be tuned to match the exciton resonance of the 2Dmaterials.They are highly robust and compatible with cryogenic and room-temperature operation.The integration is achieved by a customized ion-assisted physical vapor deposition technique, which does not degrade the optical properties of the 2D-materials.The monolithic 2D-resonator is shown to have a high Q-factor in excess of 4500.We use photoluminescence (PL) experiments to demonstrate that the coating procedure with a SiO 2 coating on a prepared surface does not significantly alter the electrooptical properties of the 2D-materials.Moreover, we observe a resonance induced modification of the PL-spectrum for the DBR embedded flake.Our system thus represents a versatile platform to resonantly enhance and tailor light-matter-interaction in 2D-materials.The gentle processing conditions would also allow the integration of other sensitive materials into these highly resonant structures.