Modified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC
材料科学
接触电阻
冶金
复合材料
作者
Patrick W. Leech,Martyn H. Kibel,P. Tanner
出处
期刊:MRS Advances [Springer Nature] 日期:2021-05-27
标识
DOI:10.1557/s43580-021-00072-7
摘要
The modified sheet resistance, Rsk, and specific contact resistance, ρc, of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC have been measured using the circular transmission line model (CTLM). The Ni/Pt/Ni/Pt and Pt/Ni contacts have shown a continuous decrease in Rsk and ρc as a function of annealing temperature from 20 to 1000 °C. A minimum value of Rsk of 5.5 Ω/sq was obtained for Ni/Pt/Ni/Pt contacts at 1000 °C. In comparison, the Ti/Pt and Ti/Ni/Au contacts have shown a significant reduction in Rsk and ρc only after annealing at 900–1000 °C. The ratio of Rsh/Rsk has been determined for each type of contact after annealing at 1000 °C.