CO2Gas Sensing By Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

CO2gas sensing responses are measured using our in-house fabricated CMOS-MEMS ScAlN-based pyroelectric detector with 12% Sc doped concentration. Leveraging on mid-IR absorption behavior of CO2gas caused by interaction of CO2with light at 4.26 µm wavelength, our ScAlN-based pyroelectric detector successfully detect CO2gas response ranging from CO2concentrations of 5000 ppm down to 200 ppm. Gas channel lengths are varied from 6 cm to 10 cm and their respective CO2responses are measured. Finally, with N2 as the reference gas, we calculate the gas response percentage change of CO2gas at different gas channel lengths and concentration.