光学
干涉测量
偏移量(计算机科学)
物理
校准
天文干涉仪
计算机科学
量子力学
程序设计语言
作者
Chao Wang,Zejiang Deng,Chenglin Gu,Yang Liu,Daping Luo,Zhiwei Zhu,Wenxue Li,Heping Zeng
出处
期刊:Optics Letters
[Optica Publishing Group]
日期:2018-03-27
卷期号:43 (7): 1606-1606
被引量:40
摘要
Herein, the method of spectrum-encoded dual-comb interferometry is introduced to measure a three-dimensional (3-D) profile with absolute distance information. By combining spectral encoding for wavelength-to-space mapping, dual-comb interferometry for decoding and optical reference for calibration, this system can obtain a 3-D profile of an object at a stand-off distance of 114 mm with a depth precision of 12 μm. With the help of the reference arm, the absolute distance, reflectivity distribution, and depth information are simultaneously measured at a 5 kHz line-scan rate with free-running carrier-envelope offset frequencies. To verify the concept, experiments are conducted with multiple objects, including a resolution test chart, a three-stair structure, and a designed "ECNU" letter chain. The results show a horizontal resolution of ∼22 μm and a measurement range of 1.93 mm.
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