材料科学
响应度
光电探测器
光电子学
纳米孔
蚀刻(微加工)
光电导性
制作
纳米技术
医学
替代医学
图层(电子)
病理
作者
Huiru Yang,Tong‐Huai Cheng,Qian Xin,Yiyuan Liu,Haotian Feng,Feng Luo,Wenxiang Mu,Zhitai Jia,Xiaofeng Tao
标识
DOI:10.1021/acsami.3c05265
摘要
In this work, square nanopore arrays were developed on the surface of β-Ga2O3 microflakes using focused ion beam (FIB) etching, and solar-blind photodetectors (PDs) were fabricated based on the β-Ga2O3 microflakes with square nanopore arrays. The β-Ga2O3 microflake-based device was transformed from a gate voltage depletion mode to an oxygen depletion mode by FIB etching. The developed device exhibited excellent solar-blind PD performance with extremely high responsivity (1.8 × 105 at 10 V), detectivity (3.4 × 1018 Jones at 10 V), and light-to-dark ratio (9.3 × 108 at 5 V) as well as good repeatability and excellent stability. The intrinsic mechanism responsible for this performance was then systematically discussed. This work opens up a new avenue for the fabrication of high-performance β-Ga2O3-based low-dimensional PDs with high reproducibility by employing the FIB etching process.
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