材料科学
退火(玻璃)
薄膜
制作
化学气相沉积
纳米技术
金属有机骨架
化学工程
导电体
电导率
复合材料
有机化学
物理化学
吸附
病理
化学
工程类
替代医学
医学
作者
Seoungmin Chon,Ryo Nakayama,Shunta Iwamoto,Shigeru Kobayashi,Ryota Shimizu,Taro Hitosugi
标识
DOI:10.1021/acsami.3c14401
摘要
Metal-organic frameworks (MOFs) are attractive materials with periodic pore structures constructed by coordinating metal ions and organic ligands. Recently, Cu3(HHTP)2 (HHTP = 2,3,6,7,10,11-hexahydroxytriphenylene), a two-dimensional conductive MOF, has attracted attention as a promising device material. Owing to the anisotropy of Cu3(HHTP)2 properties, oriented thin films of this MOF are desired for evaluating its physical properties and device integration. To date, wet processes have been used to fabricate Cu3(HHTP)2 films, whereas dry processes are essential for high-quality devices. However, oriented Cu3(HHTP)2 thin films have not yet been fabricated by using dry processes. In this study, we succeed in fabricating an orientation-controlled Cu3(HHTP)2 film on Al2O3 (001) by using a two-step dry process involving (1) the multilayer deposition of copper acetate and HHTP using a vapor deposition system and (2) pyridine vapor-assisted annealing. In-plane and out-of-plane X-ray diffraction patterns confirm the successful fabrication of the (001)-oriented Cu3(HHTP)2 films. The conductivity evaluated by four-probe measurements is 2.6 × 10-2 S cm-1, comparable to that of films fabricated by wet processes. This study provides a novel guideline for the orientation control of two-dimensional conductive MOF thin films via a dry process.
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