Silicon 6.4 Tb/s micro-ring modulator array chip with wavelength multiplexed and port multiplexed for optical interconnect

We demonstrate a silicon micro-ring modulator array chip with eight-wavelength multiplexed and four-port multiplexed. All micro-ring modulators can support 100 Gb/s OOK /PAM4 modulation and 200 Gb/s PAM4 modulation. The total transmit data rate can be 6.4 Tb/s.