Phase Compensation Method for the Drive Loop of MEMS Gyroscope Based on Dual Phase-Locked Loop Synchronous Tracking

This paper proposes a phase compensation scheme for MEMS gyroscope drive closed-loop based on the dual phase-locked loop synchronous tracking, which can reduce the phase error caused by the ADC/DAC and be a universal solution for digital drive control circuit of gyroscope. An additional phase-locked loop (PLL) is added to the drive-close loop in order to track the phase error caused by circuits. Experimental results show that the resonant phase returns to about -89.8° from -63.3°, resulting in that the resonant frequency changes to the resonant frequency 6620Hz from 6605Hz. This method can automatically adapt to the gyroscopes with different frequencies.