摄影术
计算机科学
迭代重建
变压器
人工智能
集成电路
电子线路
计算机视觉
电子工程
算法
计算机硬件
光学
电气工程
工程类
物理
电压
衍射
操作系统
作者
Iksung Kang,Yudong Yao,Junjing Deng,Jeffrey A. Klug,Stefan Vogt,Steven Honig,George Barbastathis
标识
DOI:10.1364/cosi.2021.ctu6a.4
摘要
The interiors of integrated circuits (ICs) are imaged by X-ray translational scanning ptychography as the sole acquisition method of raw data. This is unlike ptycho- tomographic and ptycho-laminographic schemes, which also require the angle of illumi- nation to be scanned. The computational reconstruction is reconstructed by a Transformer, a form of machine learning algorithm also used in dynamical image processing. During training, the Transformer learns the rich priors that define the IC interior. Even though 3D reconstructions obtained from experimental raw data are not error-free, the technique shows promise toward drastically reducing the overall scanning time.
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