High-Voltage LDMOS With Charge-Balanced Surface Low On-Resistance Path Layer

A high-voltage lateral double-diffusion MOSFET (LDMOS) with a charge-balanced surface low on-resistance path (CBSLOP) layer is proposed and experimentally demonstrated using a modified CMOS process. The CBSLOP layer can not only provide a low on-resistance path in the on-state but also keep the charge balance between the N and P pillars of a surface low on-resistance path in the off-state, which results in improved breakdown voltage (BV). The experimental results show that the CBSLOP-LDMOS with a drift length of 35 mum exhibits a BV of 500 V and specific on-resistance ( R _{on, sp} ) of 96 mOmega ldr cm ² , yielding to a power figure of merit ( BV ² / R _{on, sp} ) of 2.6 MW/cm ² . The excellent device performances, coupled with a CMOS-compatible fabrication process, make the proposed CBSLOP-LDMOS a promising candidate for smart power integrated circuit.