Analytical modeling of a MEMS beam resonator with release-etch holes

Abstract In this study, a simplified reduced-order modeling scheme is developed to determine the resonant frequency of a doubly clamped beam microelectromechanical system (MEMS) resonator with square release-etch holes. New formulations of the effective bending and shear stiffnesses are proposed and applied to the Timoshenko beam equations. The model is validated by comparison with finite element analysis results. The results show that the model can achieve high accuracy for a wide range of dimensions. In conclusion, the developed model is expected to contribute to reduced-order modeling of MEMSs devices.