材料科学
分层(地质)
复合材料
扫描电子显微镜
模具(集成电路)
开裂
弯曲
烧结
碳化硅
断裂(地质)
压力(语言学)
极限抗拉强度
变形(气象学)
纳米技术
俯冲
构造学
生物
哲学
古生物学
语言学
作者
Keisuke Wakamoto,Takukazu Otsuka,Ken Nakahara,Vijendran Mugilgeethan,Ryosuke MATSUMOTO,Takahiro Namazu
出处
期刊:IEEE Transactions on Components, Packaging and Manufacturing Technology
[Institute of Electrical and Electronics Engineers]
日期:2023-02-01
卷期号:13 (2): 197-210
被引量:18
标识
DOI:10.1109/tcpmt.2023.3242423
摘要
This article investigates the degradation mechanism of sintered silver (s-Ag) layer in silicon carbide (SiC) die attach by means of thermal shocked test (TST) and nine-point bending test (NBT). TST can thermally provide out-of-plane deformation with s-Ag die layer, whereas NBT developed by the authors can mechanically provide the out-of-plane deformation. Two types of Ag paste (NP: nanopaste and NMP: nano- and micropaste) are employed, which are sintered with 300 °C for 10 min under 60-MPa pressure for SiC die attach. TSTs are conducted under thermal cyclic loading between −40 °C and 150 °C with trapezoidal waveform for 60 min per a cycle. NBTs are conducted under cyclic mechanical loading between 0 and 300 N with triangle waveform for 3 min per a cycle at 150 °C. Scanning acoustic tomography (SAT) evaluates the die-attach delamination during TST and NBT, which starts from the edge of the die. Cross-sectional scanning electron microscopy (SEM) observation demonstrates that mechanical cracking and material aging in s-Ag layer coexist after TST under the −40 °C to 150 °C conditions only. A damage parameter (DP) proposed in this study works well to fit the delamination area ratio in the cracking and cracking-aging specimens separately after 1000 cycles. Molecular dynamics (MD) simulation and classical pore growth discussion suggest that pores can grow under only tensile stress state at high temperature, which would have given rise to the difference between the two degradation mechanisms.
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