Research progress on moisture resistance of gas sensors

Abstract Sensors used to detect explosive, flammable, toxic, and harmful gases are in focus of research. The gas sensor can be affected by many factors in the process of use, and among the many adverse elements affecting the function of the gas sensor, humidity is the most common. With the rapid development of gas sensors, the influence of humidity on gas sensors has been paid more and more attention. To reduce the impact of humidity, many methods have been proposed. In this review, the specific impact of humidity on the function of metal‐oxide semiconductors and solid electrolyte gas sensors is summarized. Practical techniques are proposed to reduce the effect of humidity on device performance, which is of great help in improving the detection efficiency and quality of gas sensors in high‐humidity environment. The information may be valuable for expanding the application field of gas sensors.