Electrowetting, as a well-known approach to increasing droplet wettability on a solid surface by electrical bias, has broad applications. However, it is limited by contact angle saturation at large voltage. Although several debated hypotheses have been proposed to describe it, the physical origin of contact angle saturation still remains obscure. In this work, the physical factors responsible for the onset of contact angle saturation are explored, and the correlated theoretical models are established to characterize electrowetting behavior. Combination of the proper 3-phase system employed succeeds in dropping the saturating contact angle below 25°, and validates that the contact angle saturation is not a result of device-related imperfection.