作者
Chih‐Yuan Tsai,Yen‐Chia Cheng,Hao-Sung Chiu,Yu-Han Kung,Ting-Chun Lee,Tzu‐Yi Yang,Chi-Shiang Chen,Chen-Hsun Wu,Ching‐Fuh Lin
摘要
Characterized by their self-emissive nature, high pixel density, high brightness, and long lifespan, Micro-LEDs are widely utilized in AR/VR/MR display devices. However, their fabrication often relies on time-consuming, costly, and energy-intensive mass transfer processes, posing significant challenges to scalability and efficiency. To address these issues, we propose a negative-photoresist-based color conversion technology as an alternative to mass transfer, effectively mitigating production bottlenecks. This approach employs highly transparent negative-photoresist hybrids to fabricate uniform and precise color conversion microarrays through a streamlined process. Using photolithography, high-density pixels are formed, eliminating traditional steps such as etching and protective layer curing. This significantly reduces process complexity, saving over threefold the production time while greatly improving mass production yields. The host material exhibits exceptional transparency, thermal stability, color rendering, and environmental durability. Compared to conventional color conversion materials, such as phosphors, quantum dots, and perovskites, our color conversion microarrays demonstrate superior stability, high conversion efficiency, non-toxicity, and cost-effectiveness. To further enhance color fidelity, a high-reflectivity black matrix was developed to optimize blue light source utilization and minimize color crosstalk. Leveraging this technology, we successfully fabricated 1×1μm color conversion pixel microarrays with a monochromatic pixel density of 14,115 PPI and a full-color pixel density of 7,058 PPI, achieving a thickness of just 1.5μm. The color conversion efficiency reached 74.40% for green light and 71.62% for red light, with nearly 99.44% coverage of the NTSC color space under color-purity-enhancement film (CPEF) coverage. These findings offer promising solutions for ultrahigh-resolution AR/VR/MR displays.