纳米制造
纳米计量学
纳米技术
计算机科学
减色
钥匙(锁)
纳米光刻
系统工程
制造工程
材料科学
工程类
原子力显微镜
制作
物理
医学
计算机安全
替代医学
病理
光学
作者
Fengzhou Fang,X. D. Zhang,Wei Gao,Y. B. Guo,G. Byrne,Hans Nørgaard Hansen
出处
期刊:CIRP Annals
[Elsevier BV]
日期:2017-01-01
卷期号:66 (2): 683-705
被引量:134
标识
DOI:10.1016/j.cirp.2017.05.004
摘要
Nanomanufacturing involves scaled-up, reliable, and cost-effective manufacturing of nanoscale materials, structures, devices, and systems. Nanomanufacturing methods can be classified into top-down and bottom-up approaches, including additive, subtractive, and replication/mass conservation processes. These include a cluster of various techniques such as nanomachining, nanofabrication, and nanometrology to produce nanotechnology components and conduct evaluation. This paper mainly focuses on the manufacturing methods for complex shapes or structures, such as textures on curves and hierarchical structures, and outlines the research perspectives and the current application status of nanomanufacturing fundamentals and key technologies.
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