Effect of Microstructure of an SiO<sub>2</sub> Thin Film on the H<sub>2</sub>-Sensing Property of an SnO<sub>2</sub> Sensor in an SiO<sub>2</sub>/SnO<sub>2 </sub>Double-Layered Structure

Catalytic activity of sξ》nsor materialg has so far been proventobean㎞po貰ant sensitivity-dctemining factor ofscmiconductor gas scnsors1)。Typical cxample is