In Micro Wire Electrical Discharge Machining (Micro-WEDM), the kerf width varies with different machining parameters, which will greatly influence the machining precision. In order to study the kerf variations in Micro-WEDM, the influence of kerf variation is analyzed and the experiment considering the kerf width and machining speed are performed on self-developed micro-WEDM under different machining parameters. With the reference of the experiment results, 32μm wide slot is machined with Φ30μm wire-tool on stainless steel workpiece.