Heat generated from machining process will result in thermal deformation of ball screw and affecting working accuracy.Its thermal deformation was worked out through traditional analytic method according to past researches,which neglects thermal deformation of parts during machining process and then affects the accuracy of results.Influences of thermal deformation can be gained through FEA,which includes modeling,bringing temperature field of heat producer into model,carrying out numerical simulation and achieving thermal deformation of ball screw.Research results help to analyze how thermal deformation of ball screw works on working accuracy and optimization design of improving accuracy and then provide some theoretical basis in compensating errors during machining process.