薄脆饼
材料科学
溅射沉积
光电子学
基质(水族馆)
腔磁控管
晶体管
溅射
半导体
平面的
薄膜
电子工程
纳米技术
计算机科学
电气工程
电压
海洋学
计算机图形学(图像)
工程类
地质学
作者
Zhengwang Cheng,Ruo-Yue Fan,Aobo Wang,Quanshen Li,Jiadi Yu,Huating Bo,Shengjia Li,Yang Zhang,Wei Zou,Jinhu Fan,Xinguo Ma,Mei Wang
标识
DOI:10.1021/acs.cgd.3c01048
摘要
Thickness is a crucial parameter that significantly influences the optical, piezoelectric, and magnetoelectric properties of films. Reducing the film’s thickness nonuniformity at wafer scale is quite important for industrial manufacturing but difficult and challenging. Conventionally, the complementary metal-oxide-semiconductor transistor (CMOS)-compatible magnetron sputtering (MS) method employs planar targets, which often leads to an unsatisfactory thickness distribution, i.e., thick in the center and thin at the edges. To address this issue, a concave target is proposed based on the theoretical thickness distribution model and is experimentally manufactured to optimize the thickness nonuniformity of magnetron-sputtered films. Additionally, the influences of target size and target–substrate distance are also investigated. Our results demonstrate that using a concave target with a large radius is effective for improving the thickness uniformity. For instance, ultrauniform Mo films are deposited onto a 2-in. Si/SiO2 wafer, exhibiting a notably low thickness nonuniformity of 0.38%. Our results provide theoretical guidance and the experimental prototype for the large-scale preparation of ultrauniform films. Moreover, these findings could be applied to other materials.
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