Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

High-end optical elements determine the performance of high-end equipment.Researching the ultra-precision machining technology and equipment for high-end optical elements is crucial for strengthening China's manufacturing industry and satisfying the requirements of the high-end equipment industry.In this study, the ultra-precision machining methods and equipment for optical elements, high-performance basic components, and measurement methods and equipment used in ultra-precision optical machining are analyzed.Five development trends are summarized including extremalization of precision and size, integration of shape and performance, compounding of machining technologies, integration of machining and measurement, and intellectualization of equipment and processes.Through extensive survey and discussions, a technology roadmap for ultra-precision manufacturing of high-end optical