The preparation of ZrO2-Y2O3-Fe2O3 film by a Rf-co-sputtering method.

ZrO2-Y2O3-Fe2O3 solid solution films were produced by a rf-co-sputtering method. The single monoclinic and tetragonal phase appeared for <0.2 mol% and >3.6 mol% (Y2O3+Fe2O3), respectively. On the other hand, the monoclinic and tetragonal mixed phase with the same (Y2O3+Fe2O3) content appeared for 0.2-3.6 mol% (Y2O3+Fe2O3). The single monoclinic and tetragonal phase were stable during the aging at temperature between 673-1473 K in air. In the mixed phase films, the tetragonal phase transformed isothermally to the monoclinic phase without the (Y2O3+Fe2O3) content change during the aging at temperature between 1073-1473 K in air.