Effect of electron-beam irradiation on electrical characterization of nanowires in scanning electron microscope

The characterization of electrical properties of individual nanowires/nanotubes inside scanning electron microscopes has been demonstrated. However, the effect of electron-beam irradiation on the characterization results is not clearly known. Using a MEMS device we developed for the electromechanical characterization of nanowires, this study reveals that electron irradiation significantly alters the measured current-voltage characteristics of nanowire specimens. Single silicon nanowires are characterized using this MEMS device. The electron irradiation effect is quantified.