微电子机械系统
光电子学
压阻效应
灵敏度(控制系统)
电容感应
作者
Xuge Fan,Fredrik Forsberg,Anderson D. Smith,Stephan Schröder,Stefan Wagner,Henrik Rödjegård,Andreas Fischer,Mikael Östling,Max C. Lemme,Frank Niklaus
标识
DOI:10.1038/s41928-019-0287-1
摘要
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next-generation mobile, wearable and implantable devices. However, these NEMS devices require transdu ...
科研通智能强力驱动
Strongly Powered by AbleSci AI