Structured light concepts for ultrafast production of micro-optical components

Ultrashort pulsed lasers represent unique tools for the processing of micro-optical components. Pulse durations around 1 ps and corresponding extreme peak intensities lead to interaction processes with all conceivable materials. As parts of almost every optoelectronic device, transparent materials represent a particularly challenging example for processing. Here, a controlled energy deposition at the surface or inside the volume is required while maintaining optical properties or implemented functionalities of adjacent areas. The talk will review strategies for the micro-processing of transparent materials that become possible by spatiotemporal beam shaping. Here, the beneficial use of non-diffracting beams is discussed as well as 3D-beam splitting approaches.