Electrical and Optical Properties of Multi-Layered (ITO/Ag/ITO)nTransparent Conductive Films Grown onto PET Substrates

Transparent conductive films having the sandwich structure of indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO) and indium tin oxide/silver/indium tin oxide/silver/indium tin oxide (ITO/Ag/ITO/Ag/ITO) were grown onto PET substrates by a radio frequency magnetron sputtering method at the room temperature. The electrical and optical properties of the ITO/Ag/ITO films were compared with those of ITO/Ag/ITO/Ag/ITO films. Under optimal deposition conditions, thin films of ITO/Ag/ITO/Ag/ITO with a sheet resistance of 10.8 Ω/γ and an optical transmittance of over 60% in the visible spectrum range and an optical reflectance of under 20% in the visible spectrum range were achieved. This work provides better initial understanding of the relationship between sputter process conditions and their influence on electrical and mechanical performance.