Structure Design and Simulation Analysis of Multiple Micro Piezoelectric Cantilevers

In order to effectively capture the environment vibration energy, convert it into electricity and supply energy for the microelectronics devices, multiple micro piezoelectric cantilevers are designed. It is composed of more than one piezoelectric cantilever array, which broaden the resonant frequency band of the piezoelectric vibrator, and it can produce resonance or similar to the resonance in a frequency range. Compared to a single piezoelectric cantilever, multiple piezoelectric cantilevers can effectively broaden the resonant frequency and improve the piezoelectric power generation capacity. The simulation results show that the finite element method can provide important theoretical guidance for the structural design of multiple micro piezoelectric cantilevers.