Preparation of Porous Silicon by Electrochemical Method

By using the electrochemical method,porous silicon of different structures and morphologies was prepared in double cell,in order to revealits features. The results have shown that the p~+ silicon can be corroded more easily than n~+ silicon, and the distribution of the pores on p~+ silicon is more uniform. Its surface and inner structure are also very uniform,and a deep porous silicon layer can be reached easily. It can be used in MEMS technology widely. The cracking phenomenon occurred in the experiments was also studied.It is thought to be the acting of the stresses created by the volatilizing of the solutions in the pores and the expanding and shifting of the crystal lattice in the process of porous silicon oxidization.