G1001-5-3 High Sensitive Force Sensor using Cr-N Thin Film Strain Gauge

We have developed a Cr-N alloy thin film showing a gauge factor of about 10 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. We have prepared a force sensor using the film strain gauge, and found that the sensitivity of the sensor is about five times higher than those of a conventional metal foil gauge.