制作
光刻
材料科学
表征(材料科学)
热电效应
光电子学
镍
铜
工作(物理)
沉积(地质)
塞贝克系数
冶金
电子工程
纳米技术
机械工程
复合材料
工程类
地质学
古生物学
沉积物
替代医学
医学
热力学
病理
物理
热导率
作者
Krishna Veni Selvan,Mohamed Sultan Mohamed Ali
标识
DOI:10.1109/memsys.2018.8346642
摘要
This work reports a simple lateral-structured thermoelectric devices using copper (Cu) and nickel (Ni) thermolegs. The approach includes the usage of low cost photolithography and without the needs of Cu deposition, leading to much easier and faster fabrication. The lateral device structure has never been implemented into any Cu-Ni devices to date. Investigations on variating the thermoleg's width (w) and length (l) realizes 5.72 μW at optimized design, possessing w and l of 1000 μm and 20 mm respectively. Moreover, the lateral structure presented in this work has generated larger power by 2.79 improvement factor than the previous vertically-structured device.
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