材料科学
氧化物
钙钛矿(结构)
蚀刻(微加工)
基质(水族馆)
形态学(生物学)
外延
复合氧化物
各向同性腐蚀
化学工程
热的
降水
薄膜
矿物学
原位
曲面(拓扑)
曲面重建
晶体生长
氧化铝
纳米技术
激光器
成核
光电子学
过程(计算)
脉冲激光沉积
无机化学
独立性(概率论)
作者
Maren Jäger,Ali Teker,Jochen Mannhart,Wolfgang Braun
摘要
Using a CO2 laser to directly heat the crystals from the back side, SrTiO3 substrates may be thermally prepared in situ for epitaxy without the need for ex-situ etching and annealing. We find that the formation of large terraces with straight steps at 900–1100 °C is independent of the formation of the ideal surface reconstruction for epitaxy, which requires temperatures in excess of 1200 °C to complete. The process may be universal, at least for perovskite oxide surfaces, as it also works, at different temperatures, for LaAlO3 and NdGaO3, two other widely used oxide substrate materials.
科研通智能强力驱动
Strongly Powered by AbleSci AI