DEPOSITION OF HARD YET MODERATELY DUCTILE MoBC COATINGS BY PULSED-DC MAGNETRON SPUTTERING

Novel nanolaminated MoBC coatings were prepared using a combination of non-reactive direct current and pulsed direct current magnetron sputtering. Depending on the deposition conditions the coatings were either of amorphous or of nanocomposite nature. Nanocomposite coatings showed good hardness and Young’s modulus and showed no tendency to form cracks even for high-load nanoindentation testing.