The main aim of this study is to analyze the effect of the severe plastic deformation (SPD) on the mechanical properties and defect structure of metastable beta Ti alloys. Experiments were performed on two different β-Ti alloys: Ti-15Mo and Ti-6.8Mo-4.5Fe-1.5Al which were subjected to severe plastic deformation (SPD) by high pressure torsion (HPT). The increase of hardness with increasing equivalent strain was determined by microhardness mapping. Dislocation density was studied by advanced techniques of positron annihilation spectroscopy (PAS). Microhardness and dislocation density increases with increasing equivalent strain inserted by severe plastic deformation.