Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Abstract The effective electromechanical coupling coefficient ( K eff 2 ) is one of the crucial parameters to evaluate the performance of resonators. However, the low effective electromechanical coupling coefficient K eff 2 limits the application of lamb wave resonators in filters. This work presents the impact of metallization rate on the K eff 2 of AlN Checker-mode resonators (CKMRs) by using the finite element analysis approach for the first time. Four types of piezoelectric effect excitation configurations are proposed with different electrode designs based on AlN CKMRs. The results show that CKMRs have the largest K eff 2 with the metallization rate of 0.25–0.31 for the top electrode. Meanwhile, when the metallization rate of the top electrode varies from 0.2 to 0.7, the K eff 2 of open CKMRs possess the most remarkable enhancement of about 235% of CKMRs. By properly optimizing the electrode design, CKMRs exhibit potential in commercial applications.