A Capillary-Based Micro Gas Flow Measurement Method Utilizing Laminar Flow Regime

Accurate micro gas flow measurement is critical for medical ventilator calibration, environmental gas monitoring, and semiconductor manufacturing. Laminar flowmeters are widely employed in micro gas flow measurement applications owing to their inherent advantages of high linearity, the absence of moving components, and a broad measurement range. Nevertheless, due to the low measurement accuracy under micro gas flow caused by nonlinear errors and a relatively complex structure, traditional laminar flow measurement devices exhibit limitations in micro gas flow measurement scenarios. This study proposes a novel micro gas flow measurement method based on a single capillary laminar flow element, which simplifies the structure and enhances applicability in the field of micro gas flow. Through structural optimization with precise control of the capillary length–diameter ratios and theoretical error correction based on computational analysis, nonlinear errors were effectively reduced while improving the measurement accuracy in the field of micro gas flow. The proposed methodology was systematically validated through computational fluid dynamics simulations (ANSYS Fluent 2021 R1) and experimental investigations using a dedicated test platform. The experimental results show that the relative error of the measurement system within the full measurement range is less than ±0.6% (1–10 cm3/min; cm3/min means cubic centimeter per minute), and its accuracy is superior to 1% of reading (1% Rd) or 1.5% of reading (1.5% Rd) of conventional laminar flowmeters. The fitting curve of the flow rate versus the pressure difference derived from the measurement results maintains an excellent linear correlation (R2 > 0.99), thus confirming that this method has practical application value in the field of micro gas flow measurement.